Re: Magnetron sputter system
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Sounds like high resistance in the power transfer cables. Measure the voltage drop and knowing the current, calculate their resistance. What is their wire size? ? Hope that helps. ? Jerry ?
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From: VacuumX@... [mailto:VacuumX@...]
Sent: Thursday, October 30, 2014 12:33 PM
To: VacuumX@...
Subject: Re: [VacuumX] Re: Magnetron sputter system? ? When the resistance between the box terminals is at least four times the resistance of the power leads, you will deliver four times the power to the box as to the power leads.
Start with a cold check on the two resistance values - the part that gets hotter will get higher in resistance.
Brian Whatcott?? Altus OK On 10/30/2014 4:00 PM, Andrew Aurigema eosraptor@... [VacuumX] wrote: Dave, I have a 280 amp resistive heater box ( Leskers ) that I have tried to make glow several times.? It always ends after a few seconds with the wiring getting very hot.? My 5kw welding transformer can put out the amps ( about 1000 amp at 5 vac ) but I cant seem to get it thru the chamber wall without melting power transfer cables.? I have a 3/4 inch dia copper rod high amperage pass thru ( that came with the chamber ) and have 3 each 3/8" stranded copper wire cables running from the pass thru to the little tantalum box. Only one cable is shown in the picture but now there are 3 of them. ? I just cant make that box glow red before the power cables do. ? So I am thinking of switching to plasma sputtering like the big boys do. ? The big transformer works fine for driving the 36 emitters around the chamber ( 4 at a time ) so laying down aluminum is no problem.? It is putting down the overcoat that I cant seem to get started on. ? So do you have any suggestions on how to make the tantalum box glow red or where to get a plasma system cost effectively ??? ? On Thu, Oct 30, 2014 at 4:27 PM, dgrove@... [VacuumX] <VacuumX@...> wrote: What issues are you having with the SiO that sputtering will fix? That's a
pretty big leap from resistive sources to sputtering.
Dave
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