¿ªÔÆÌåÓý

ctrl + shift + ? for shortcuts
© 2025 Groups.io

Re: Magnetron sputter system


 

?ARRRRRGGGGGGGGG ?this electrical stuff makes no sense.? Copper is from like back in the Jurassic period and is good...... stainless steel is from the space age and is bad. ? ?

My reading has brought me to realize that stainless steel is a serious "no no" in high current flow efforts.? I now have a 14 item list of things to replace in my system so that I can increase the current flow to the tungsten coils and tantalum box heater.?

I have not given up on magnetron sputtering but I have a far better chance of making gaseous silicon monoxide with the tantalum boat heater than with a ( yet to be designed or built ) magnetron sputtering system.? So while I explore the unknowns of HV magnetron plasma deposition offline in a small vacuum chamber, I will be trying to make the little tantalum box glow white hot in the big chamber.? My vintage 1970's thin film measurement and process controller can run either concept once I figure out how to get it working. ?

Now that I know mister copper is my friend, what could possibly go wrong :_))))))))))) ?

Drew in sunny Florida


On Wed, Nov 5, 2014 at 3:42 PM, Andrew Aurigema <eosraptor@...> wrote:
Well I looked up the specs for the tantalum box and it is 257 amps at 1.4 volts requiring 360 watts.? I have 12 vac at 500 amps available so I presume I have enough power.?

I also looked up the current carrying capacity of the 3/8" dia steel threaded rods that make up the pass thru's.? It was very much less than it needed to be.? So I will be changing out the two 3/8" steel rods for two 1/2" copper rods and between the two parallel pass thru's I should have a true 500 amps rated capability.? I am also stepping up to 4 each power feeds leading to the tantalum box and 4 each leads going to chamber ground.? Each lead should be 90 amps so that is 360 amps of capability leading to and exiting away from the box. ?

The main feeds to the pass thru's are 3/4" copper stranded cable so that is 500 amp plus. ?

Along with cleaning up all contacts and eliminating all stainless steel conductors in the system I think the next time I power the system up it will glow white hot only where it is supposed to and not along the path. ?

This electricity stuff is nearly as tricky as vacuum. ? ? ??

On Thu, Oct 30, 2014 at 5:19 PM, Lindsay Wilson lindsay@... [VacuumX] <VacuumX@...> wrote:
?

Hi,

Lurker here ;-)

The only advice I could suggest - I think that when you get into the 1000A range, you really need to go with water-cooled feedthroughs.
Lesker, for example, have a 400A non-cooled feedthrough, but their 1000A feedthrough is water-cooled. Page here:



I've forgotten much of what I ever knew about thermal coating, but is it possible to use a wire basket heater instead of the boat? Or is
the silicon dioxide in powder form and would fall through?

Best regards,

Lindsay



Join [email protected] to automatically receive all group messages.