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Re: Magnetron sputter system


 

That is a monster piece of Ta.

Fold up a boat from Tantalum sheet or 'Foil' or something similar.

Machining down the Ta block is another option. Maybe two reduced necks each side of centre would also work. I don't know how Ta machines ???

Peter Smith.

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From: "Andrew Aurigema eosraptor@... [VacuumX]" <VacuumX@...>
Sent: Friday, October 31, 2014 7:00 AM
To: <VacuumX@...>
Subject: Re: [VacuumX] Re: Magnetron sputter system

Dave,

I have a 280 amp resistive heater box ( Leskers ) that I have tried to make
glow several times. It always ends after a few seconds with the wiring
getting very hot.

My 5kw welding transformer can put out the amps ( about 1000 amp at 5 vac )
but I cant seem to get it thru the chamber wall without melting power
transfer cables. I have a 3/4 inch dia copper rod high amperage pass thru
( that came with the chamber ) and have 3 each 3/8" stranded copper wire
cables running from the pass thru to the little tantalum box. Only one
cable is shown in the picture but now there are 3 of them.

I just cant make that box glow red before the power cables do.

[image: Inline image 1]

So I am thinking of switching to plasma sputtering like the big boys do.

The big transformer works fine for driving the 36 emitters around the
chamber ( 4 at a time ) so laying down aluminum is no problem. It is
putting down the overcoat that I cant seem to get started on.

[image: Inline image 2]

So do you have any suggestions on how to make the tantalum box glow red or
where to get a plasma system cost effectively ???

Drew in sunny Florida



On Thu, Oct 30, 2014 at 4:27 PM, dgrove@... [VacuumX] <
VacuumX@...> wrote:

What issues are you having with the SiO that sputtering will fix? That's a
pretty big leap from resistive sources to sputtering.

Dave



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