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Re: Magnetron sputter system


 

Dave,

I have a 280 amp resistive heater box ( Leskers ) that I have tried to make glow several times.? It always ends after a few seconds with the wiring getting very hot.?

My 5kw welding transformer can put out the amps ( about 1000 amp at 5 vac ) but I cant seem to get it thru the chamber wall without melting power transfer cables.? I have a 3/4 inch dia copper rod high amperage pass thru ( that came with the chamber ) and have 3 each 3/8" stranded copper wire cables running from the pass thru to the little tantalum box. Only one cable is shown in the picture but now there are 3 of them. ?

I just cant make that box glow red before the power cables do. ?

?? ?
?
So I am thinking of switching to plasma sputtering like the big boys do. ?

The big transformer works fine for driving the 36 emitters around the chamber ( 4 at a time ) so laying down aluminum is no problem.? It is putting down the overcoat that I cant seem to get started on. ?


So do you have any suggestions on how to make the tantalum box glow red or where to get a plasma system cost effectively ???

Drew in sunny Florida



On Thu, Oct 30, 2014 at 4:27 PM, dgrove@... [VacuumX] <VacuumX@...> wrote:
What issues are you having with the SiO that sputtering will fix? That's a
pretty big leap from resistive sources to sputtering.

Dave



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