Hi Attila,
Actually you have two unknown parameters - film thickness and refractive index dispersion, so it is not easy to find thickness exactly just from R or T spectra without some special software.
I'll try to help you. I have TiO2 films refractive index dispersion data for TiO2 deposited on substrate heated up to 250C and TiO2 deposited on cold or preheated substrate with ion beam assistance at 180 V, 5A O2 ions. I also have thin film coating software. Let me know how did you deposit your film. It looks like your films are about 100 nm thickness. What was the deposition time? What was the substrate temperature? Did you use ion beam assistance and if you did, what were its parameters?
Best regards,
Vladimir Chutko
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On 8/10/2012 6:42 AM, Attila wrote:
Hello,
Does anybody have the ability to calculate the TIO2 thin film layer thickness and refractive index, form spectrometer measurement datas?
I attached a folder and files to the files section.
Folder name: Thin film thickness. Where is two excel files. I did a transmittance measurement of a sample, where 150nm Thick Tio2 film was evaporated.
The substrate normal BK7 glass.
I can't compute the refractive index and the thickness from the datas because I don't know the methode, and the lack of knowledge.
I need this values for tooling factor calc.
Can anybody help me?
Thank's a lot!
Attila Schn
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