Thanks Yves,
Collecting data for frequency accuracy analysis is lengthy task. I wrote a powershell script to set frequency, read 8133A internal frequency counter reading (and the external frequency counter connected to the ch1 output.
I stepped frequency 1Mhz from 34Mhz to 3.5Ghz. The plot below shows the frequency error (set-reading from 8133A internal counter). Indeed there is some frequency issue in some bands, which does not have explanation.

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Regarding ch2 relay issue, I plan to open my unit tomorrow and try to fixt it. Let's see how it goes. Thanks for your step by step instruciton.
Thanks!